| 摘要 |
PURPOSE: To eliminate an adversary effect of moisture on a pulse laser oscillating device when a blower is not in operation for maintenance by a method wherein a blower is provided outside a main body case, and a gas shutoff mechanism is provided between the blower and the main body case. CONSTITUTION: A discharge electrode 12 and an electric circuit which feeds a high-voltage current to the discharge electrode 12 and a discharge electric power supply 11 are mounted on a main body case 10, and a heat exchanger 13 is mounted on the opening of the main body case 10. A blower 17 is installed outside the main body case 10, the suction side of the blower 17 is connected to the main body case 10 through the intermediary of a suction pipe 19 continuously connected to a suction port 18, and the exhaust side of the blower 17 is connected to the main body case 10 through the intermediary of a exhaust pipe 20. A gas shutoff valve 22 functioning as a gas shutoff mechanism is provided to teach of the suction pipe 19 and the exhaust pipe 20 at a halfway point, and the main body case 10 is shut off from the outside air by closing the gas shutoff valves 22. |
