摘要 |
A laser beam control and imaging system having opto-mechanical components for shaping and directing the beam of a laser and for observing light reflected or generated as a result of the laser impinging upon an object. A preferred embodiment of the invention is shown for use with infrared lasers which may be used to heat an object or to provide an additional heating source for melting selected portions of an object, such as melting pure silicon for crystal growth thereof in the manufacture of semiconductor materials. The disclosed configuration of the present invention provides for selecting the focal length and shape of the beam of the laser and for angularly directing the laser beam relative to two mutually orthogonal directions, as well as translating the position of the beam relative to the object to be heated. In addition, the present invention provides components for viewing the light reflected from the object or generated light resulting from the heating of the object, thereby indicating the precise location of the point of the beam as it impinges on the object's surface which permits precise aiming of the beam to impinge on the object at the desired point. The light imaging system comprises both telescope viewing and video imaging.
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