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发明名称
INTERATOMIC FORCE MICROSCOPE
摘要
申请公布号
JPH08278317(A)
申请公布日期
1996.10.22
申请号
JP19950083626
申请日期
1995.04.10
申请人
NIKON CORP
发明人
NAKANO KATSUSHI
分类号
G01B11/30;G01B21/30;G01N37/00;G01Q10/04;G01Q20/02;G01Q60/24;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B11/30
代理机构
代理人
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地址
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