Fluid-cooled dielectric window for a plasma system
摘要
A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.
申请公布号
US5568015(A)
申请公布日期
1996.10.22
申请号
US19950389250
申请日期
1995.02.16
申请人
APPLIED SCIENCE AND TECHNOLOGY, INC.
发明人
HOLBER, WILLIAM M.;SMITH, DONALD K.;BESEN, MATTHEW M.;FITZNER, MATTHEW P.;GEORGELIS, ERIC J.