| 摘要 |
PURPOSE: To obtain a mechanism for correcting the attitude of test head in an IC tester by means of which an operator can adjust the inclination angle of test head with small force in a short time and can correct the attitude. CONSTITUTION: A block A4 is disposed fixedly on a side plate 15 fixed to a test head 1 while a block B5 having an adjusting screw 6 is disposed fixedly on the test head stand 2 side. Inclination angleθa8 orθb9 of the test head 1 is corrected by regulating the gap between the blocks A4 and B5 by means of the adjusting screw 6 and the test head 1 is locked in a predetermined attitude by means of a hook A10. Switching from vertical to horizontal attitude is made by unlocking the hook A10 and locking test head 3 in horizontal attitude by means of hooks B11, C12.
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