发明名称 |
Orientational material, orientational substrate and surface acoustic wave device |
摘要 |
An orientational material including: diamond, and a ZnO film disposed on a surface of (111) orientational diamond provided by the diamond. Such an orientational material may suitably be used as a component for fabricating a surface acoustic wave device utilizing diamond.
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申请公布号 |
US5565724(A) |
申请公布日期 |
1996.10.15 |
申请号 |
US19940363457 |
申请日期 |
1994.12.22 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
HACHIGO, AKIHIRO;NAKAHATA, HIDEAKI;HIGAKI, KENJIRO;FUJII, SATOSHI;SHIKATA, SHIN-ICHI |
分类号 |
H03H9/145;H03H9/02;H03H9/25;(IPC1-7):H01L41/08 |
主分类号 |
H03H9/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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