发明名称 Orientational material, orientational substrate and surface acoustic wave device
摘要 An orientational material including: diamond, and a ZnO film disposed on a surface of (111) orientational diamond provided by the diamond. Such an orientational material may suitably be used as a component for fabricating a surface acoustic wave device utilizing diamond.
申请公布号 US5565724(A) 申请公布日期 1996.10.15
申请号 US19940363457 申请日期 1994.12.22
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 HACHIGO, AKIHIRO;NAKAHATA, HIDEAKI;HIGAKI, KENJIRO;FUJII, SATOSHI;SHIKATA, SHIN-ICHI
分类号 H03H9/145;H03H9/02;H03H9/25;(IPC1-7):H01L41/08 主分类号 H03H9/145
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