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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH08269693(A)
申请公布日期
1996.10.15
申请号
JP19950096124
申请日期
1995.03.28
申请人
NISSIN ELECTRIC CO LTD
发明人
NISHIYAMA SATORU;MORINO HIROSHI
分类号
C23C14/22;(IPC1-7):C23C14/22
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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