DUST REMOVAL APPARATUS, SEMICONDUCTOR PROCESSING APPARATUS, AND VAPOR DEPOSITION APPARATUS,申请号JP19950064411-传众专利搜索

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发明名称	DUST REMOVAL APPARATUS, SEMICONDUCTOR PROCESSING APPARATUS, AND VAPOR DEPOSITION APPARATUS
摘要
申请公布号	JPH08261535(A)	申请公布日期	1996.10.11
申请号	JP19950064411	申请日期	1995.03.23
申请人	SONY CORP	发明人	ENDO KATSUHIKO
分类号	F24F7/06;H01L21/205;H01L21/304;H01L21/31;(IPC1-7):F24F7/06	主分类号	F24F7/06
代理机构		代理人
主权项
地址

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