| 摘要 |
PURPOSE: To realize a high output having a good frequency purity by low power by a method wherein a plurality of Josephson junctions having critical current values different from each other are series connected, junction parts are arranged holding a dielectric coupling part, which specifies the proximate distance between the junction parts, between them and a resonance circuit element is connected between the electrodes of a junction having the smallest critical current density. CONSTITUTION: Lower electrodes 12a and 12b, which are a superconductor, are formed on a substrate 8 and upper electrodes 11a and 11b, which are a superconductor, are formed holding barrier layers 13 between the electrodes 12a and 12b and the electrodes 11a and 11b into the shape of an electrode. The junctions 11a and 11b are connected with a connection electrode 14 in the electrodes 12a and 12b holding a coupling part 11c, which consists of a dielectric material, between them and the interval between the junction parts 11a and 11b is set within 10μm for realizing a distinguished coupling between Josephson junctions. A connection electrode 23 is connected with the electrode 12b and the end part of this electrode is connected with the electrode 11b through a conductor, such as a slip line or a meander line. Thereby, a superconducting resonator is constituted as a constitution, wherein a resonance circuit element 21 is connected in parallel to both end parts of a junction 1b.
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