| 摘要 |
PURPOSE: To suppress the generation of fine particles even in a long-term storage, and minimize the difference in fine particle generating quantity according to storing temperature by mixing an alkali-soluble resin, a quinonediamide group-contained compound, and an organic solvent together, and heating the resulting mixture at a temperature within a specified range. CONSTITUTION: An alkali-soluble resin, an quinonediamide group-contained compound, and an organic solvent are mixed together, and the resulting mixture is heated to a temperature of 75-85 deg.C until the absorptivity in a wavelength of 500nm is within 0.05 and 0.75. The resist solution prepared according to this method is excellent in long-term life stability, and can be suppressed in generation of fine particles even when stored for 1 month or more, the difference in fine particle generating quantity according to storing temperature is minimized, and the generation of fine particle is also minimized even when a quinonediazide group-contained compound having a high esterification degree is used. Thus, it is suitably used for the manufacture of an electronic part to which a high yield is required. |
