| 摘要 |
PURPOSE: To provide a protection film of high quality by enhancing the efficiency of oxidation, and removing an impurity from a film formation surface without any ion irradiation. CONSTITUTION: A substrate 11 having a plurality of electrodes for electrical discharge and a dielectric layer 17 for the coverage thereof is placed within a vacuum reservoir 50. Then, ozone is introduced into the reservoir 50 at the time of forming an oxide protection film on the layer 17 in vacuum, and an ultraviolet ray UV is irradiated to the layer 17. |
