LIQUID CRYSTAL DISPLAY SUBSTRATE AND ITS PRODUCTION

摘要

PURPOSE: To form an element for preventing the dielectric breakdown of thin- film transistors(TFTs) having no possibility of the hillock of aluminum. CONSTITUTION: Either of gate signal lines 22 and drain signal lines 24 of this liquid crystal display substrate are formed of aluminum anodically oxidized on the surface. The substrate has nonlinear resistance elements to be connected to the respective signal lines in regions exclusive of its effective display region. These nonlinear resistance elements respectively consist of MIS structures having gate electrodes of the same material as the material of pixel electrodes 28, semiconductor layers of the same material as the material of the semiconductor layers of the TFTs and drain electrodes and source electrodes of the same material as the material of the signal lines exclusive of the signal lines consisting of the anodically oxidized aluminum. The gate electrodes constituting the nonlinear resistance elements are extended and superposed on the signal lines consisting of the anodically oxidized aluminum in the regions from the regions formed with the nonlinear resistance elements to external terminals 22T, 24T. These extended gate electrodes are connected to the signal lines through the parts where the anodic oxidation is selectively removed, by which the terminals are constituted.