| 摘要 |
PURPOSE: To make it composable easily and inexpensively and an acting angular velocity detectable in a highly accurate manner as well as to capacitate this sensor to be effectively utilizable for controlling the body of an automobile and a navigation system or the like after being mounted on the automobile or the like. CONSTITUTION: An angular velocity sensor is provided with at least two vibrators 19 and 20, sixteen piezoelectric resistive elements 3 to 18 and eight fixed electrode 21 to 27a and 27b, and when exciting voltage is impressed among electrodes 27a, 27b and 28 and an angular velocity is inputted in a z direction in a state that the vibrators 19 and 20 are vibrated in an x direction in reverse with each other, 'Coriolis effect' acts on an interval between both these vibrators 19 and 20, whereby these vibrators vibrate in a y direction in reverse with each other. Any variation in a value of resistance of these piezoelectric resistive elements 3 to 18 varying in proportion to this Coriolis effect is detected as a voltage variation, and thus the angular velocity is calculated on the basis of this voltage variation. |
