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发明名称
CONTACT DETECTION ELEMENT AND METHOD AND INSTRUMENT FOR MEASURING SURFACE SHAPE
摘要
申请公布号
JPH08247743(A)
申请公布日期
1996.09.27
申请号
JP19950051147
申请日期
1995.03.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
HASEGAWA MASAHIKO
分类号
G01B5/20;B81B3/00;G01B5/012;G01B11/24;(IPC1-7):G01B11/24
主分类号
G01B5/20
代理机构
代理人
主权项
地址
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