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发明名称
Verfahren zum Verbessern der Herstellung von SOI-Anordnungen mittels Positions-Ausrichtungsmarken
摘要
申请公布号
DE69212888(D1)
申请公布日期
1996.09.26
申请号
DE1992612888
申请日期
1992.05.08
申请人
SONY CORP., TOKIO/TOKYO, JP
发明人
NISHIHARA, TOSHIYUKI, SHINAGAWA-KU, TOKYO, JP
分类号
H01L21/02;H01L21/336;H01L21/60;H01L21/768;H01L21/822;H01L23/544;H01L27/04;H01L27/12;H01L29/41;H01L29/786;(IPC1-7):H01L23/544
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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