Steuerung lithographischer Werkzeuge durch latente Bilder,申请号DE19916021261-传众专利搜索

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发明名称	Steuerung lithographischer Werkzeuge durch latente Bilder
摘要
申请公布号	DE69121261(D1)	申请公布日期	1996.09.19
申请号	DE19916021261	申请日期	1991.02.07
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	HOPEWELL, WILLIAM D., RIDGEFIELD, CONNECTICUT 06877, US;JACKSON, ROBERT R., MILLBROOK, N.Y. 12545, US;SHAW, JERRY C., RIDGEFIELD, CONNECTICUT 06877, US;VAN KESSEL, THEODORE G., MILLBROOK, N.Y. 12545, US
分类号	G03F7/20;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G02B21/00;G01B9/02	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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