| 摘要 |
<p>A scanning probe microscope controller includes a digital signal processor (DSP) (72) and an analog feedback loop. The height correction signal (102) to be applied to a transducer (104) controlling the distance between the scanning probe (62) and a sample surface (64) is then generated by an analog feedback circuit where at least one parameter is under computer control. At the end of each scanline, a variance can be calculated for the data and the inverse of the quantity is used to adjust the gain with which digitization of the data is carried out. Linearization of the data to correct for non-linearities in the scanning may be carried out by the DSP. Adjustment of the feedback loop gain is also carried out in order to reduce excess oscillation.</p> |
