发明名称 Semiconductor device manufacturing method
摘要 The manufacturing method uses a substrate (1) on which a first wiring layer (3) is formed. It has a contact hole formed in the first wiring layer. A second wiring layer (7) is layered on the first wiring layer through a resin layer (5). The resin layer is made from silicon polymer of chemical formula (HO)2(R2Si2O3)NH2, where n represents an integer ranging from 2000-100000 and R represents either a hydrogen atom, a lower alkyl group or a phenyl group.
申请公布号 DE19509203(A1) 申请公布日期 1996.09.19
申请号 DE1995109203 申请日期 1995.03.14
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 NISHIMURA, HIROYUKI, AMAGASAKI, HYOGO, JP;ADACHI, HIROSHI, AMAGASAKI, HYOGO, JP;ADACHI, ETSUSHI, AMAGASAKI, HYOGO, JP;YAMAMOTO, SHIGEYUKI, AMAGASAKI, HYOGO, JP;MINAMI, SHINTAROU, AMAGASAKI, HYOGO, JP;HARADA, SHIGERU, ITAMI, HYOGO, JP;TAJIMA, TORU, ITAMI, HYOGO, JP;HAGI, KIMIO, ITAMI, HYOGO, JP
分类号 H01L21/3205;B32B27/08;C08G77/16;H01L21/312;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L23/532 主分类号 H01L21/3205
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