Radiation sensitive resin composition comprising copolymer of isopropenylphenol and T-butyl(meth)acrylate

摘要

A radiation sensitive resin composition which comprises (A) a copolymer represented by the following general formula and (B) a radiation sensitive acid generator and, if necessary, (C) an alkali-soluble resin: wherein R represents a hydrogen atom or a methyl group and m and n are integers representing the numbers of the respective recurring units and satisfying the relations 0.1>/=m/(m+n)<0.6 and 0.4