| 摘要 |
PURPOSE: To provide a method of producing a rare gas excimer for raising the luminous intensity and the emission efficiency a rare gas excimer beam. CONSTITUTION: This relates to a method of producing an excimer of rare gas by jetting gas at supersonic speed from a rubber nozzle, and producing a cluster of rare gas in the space area in the front vicinity of nozzle, and arranging a pair of electrodes with the space area between, and exciting the cluster, making use of the discharge between the electrodes, being a method of producing a rare gas excimer from rare gas cluster being generated by expanding rare gas at supersonic speed from a rubber nozzle with a high speed pulse valve. The shape of the gas expansion part is conical, and it is designed, with the length of the block of a throat under 1mm, the angle of aperture of the gas introduction partθ1 within the range of 60 deg.-120 deg., and the angle of aperture of the gas expansion part within the range of 10 deg. to 30 deg., and the length L of the gas expansion part within the range of 3mm to 20mm. |
