PRODUCTION OF QUARTZ CRUCIBLE

摘要

PURPOSE: To produce a quartz crucible for pulling up of a silicon crystal, giving a silicon wafer having long life time and capable of getting a silicon single crystal having suppressed laminar defects such as OSF. CONSTITUTION: A quartz crucible is produced by using natural quartz glass powder or synthetic quartz glass powder and the produced quartz crucible is heat-treated in hydrogen gas or a mixture of hydrogen gas and an inert gas under normal or positive pressure to include >=1×10<16> molecules/cm<3> of hydrogen molecules in the quartz crucible.