发明名称 |
Polar bond head |
摘要 |
A polar motion bond head for bonding semiconductor devices includes voice coil motors for providing positioning motion to the bond head, and a vision system that has an optical path that allows the camera to see all polar positions with the image staying on the camera centerline. |
申请公布号 |
US5556022(A) |
申请公布日期 |
1996.09.17 |
申请号 |
US19940254225 |
申请日期 |
1994.06.06 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ORCUTT, JOHN W.;LIN, GALLE |
分类号 |
H01L21/60;B23K20/00;(IPC1-7):B23K1/06 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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