PROCEDE POUR LE DEPOT ASSISTE PAR PLASMA D'AU MOINS UNE COUCHE MINCE SUR UN SUBSTRAT A DEUX FACES, ET REACTEUR CORRESPONDANT

摘要

A method wherein at least one thin film may be deposited on a substrate (10) having two sides (11A, 11B) by means of a plasma interacting with a precursor fluid so that the reaction products of the plasma and the fluid form the desired deposit. Both sides (11A, 11B) of the substrate (10) may be processed simultaneously by using two different plasmas (12A, 12B) of which one acts on one of the sides (11A, 11B) of said substrate (10) while the other acts on the other side thereof. The method is particularly suitable for providing an anti-reflection coating on an ophthalmic lens made of organic material.