摘要 |
PURPOSE: To obtain a microscopic total reflection absorption spectrum measuring apparatus which can measure even a micro part on a sample with high sensitivity comparable to that of high reflection absorption spectroscopy(RAS). CONSTITUTION: The microscopic total reflection absorption spectrum measuring apparatus comprises a total reflection objective optical system (Cassefrain mirror) including a main concave mirror 2 and a sub-convex mirror 3, and a metal plate 8 applied tightly to the rear of a sample 7 being pressed by a hemispheric ATR (total reflection absorption spectrum measuring method) prism 4 centered at the focus point of the optical system. At the time of measurement, the ATR prism 4 is brought into tight contact, at an appropriate pressure, with the sample 7 placed on the metal plate 8. Consequently, the light entering into the metal plate (conductor) 8 through the sample layer produces a steady wave having amplitude corresponding to the incident angle. Since interaction with the sample 7 is enhanced, the absorption of the sample 7 is amplified thus contributing to the enhancement of the sensitivity. |