| 摘要 |
PURPOSE: To obtain a small-sized convenient chemical sensor excellent in sensitivity and analytic response in which only a trace specimen is required. CONSTITUTION: The chemical sensor for measuring the quantity of objective substance by detecting the reaction heat thereof to a substance being received comprises a sensor body 2 including a thin substrate 3 and a support 4 formed integrally with the fringe thereof, temperature detection elements 5a, 5b formed on the surface of the thin substrate 3, and a membrane 6 of the substance being received fixed to the surface of the thin substrate 3. Preferably, a pair of thermopiles tar comparison and detection and a membrane of the substance being received covering the temperature contact part 5ah of one thermopile are formed, as the temperature detection elements 5a, 5b, on the surface of the sensor body 2 by lithography technology. |
