ELECTRON EMISSION ELEMENT

摘要

PURPOSE: To prevent one emitter evaporated from giving influence to the other emitters by arranging a base electrode narrower than the emitter not to overlap with the protrusion of the emitter in a plane view. CONSTITUTION: A base layer 2 with a grid base electrode 1 and a gate layer 4 with an electron drawing layer 3a and an insulating layer 5 are provided on an insulating substrate 9. Emitters 7 which have protrusions 7a opposed to the electron drawing layer 3a via small cavities 8 are protruded in recesses 6 provided in the gate layer 4. Voltage is applied to the base electrode 1 and the electron drawing layer 3a to form a strong electric field for emitting electrons from the emitter 7. For such an electron emission element, the base electrode 1 is formed narrower than the emitter 7 not to overlap with the protrusion in a plane view on the substrate 9 side of the emitter 7. In this way, if the emitter is evaporated and deposited onto the insulating layer due to an overcurrent, not short-circuit is occurs and no influence is given to the function of other emitters.