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发明名称
HOCHTEMPERATUR-DIFFUSIONSOFEN
摘要
申请公布号
DE69025955(T2)
申请公布日期
1996.09.12
申请号
DE19906025955T
申请日期
1990.12.20
申请人
THERMTEC, INC., CAMPBELL, CALIF., US
发明人
MCENTIRE, WILLIAM, D., SONORA, CA 95370, US;ERICKSON, RONALD, E., JAMESTOWN CALIFORNIA 95327, US
分类号
F27B14/06;F27B14/08;F27D1/00;F27D11/02;H01L21/22;H01L21/324;H05B3/06;H05B3/64;H05B3/66;(IPC1-7):F27D11/02
主分类号
F27B14/06
代理机构
代理人
主权项
地址
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