Tintenstrahlaufzeichnungskopf

摘要

A plurality of heaters (3,4,5) are provided on a silicon substrate (1) in a plurality of individual ink channels (9). Each heater is constructed from a thin-film resistor (3) and a thin-film conductor (4,5). The thin-film resistor (3) is formed with an electrical-insulation layer (3') on its upper surface. The electrical-insulation layer (3') is formed by subjecting the thin-film resistor (3) to a high-temperature thermal oxidation process. The thin-film resistor (3) formed with the electrical-insulation layer (3') may be covered with an additional insulation layer (7, Fig. 5) of a thickness substantially equal to that of the thin-film resistor (3). A partition wall (8) covers all of the conductor (4) and also covers part of the resistor (3). A nozzle (12) is arranged above the resistor (3) as shown in the Figure.