Optical system for excimer laser

摘要

The optical system provides a sharp illumination line (B), with long and short axes, from the laser beam (12) provided by a high power laser source (10), using an anamorphotic arrangement of imaging and homogenising optical elements (16,18,20,22,24,26,30,32). The laser beam is separately imaged and homogenised for the long and short axes, the imaging and homogenising for the short axis employing a uniformly illuminated gap (26), imaged onto the illumination plane via a reducing lens (32).