| 摘要 |
PURPOSE: To obtain a coating liquid for forming a metallic oxide film, good in uniformity of films, adhesion and film strength and excellent in preservation stability without causing pinholes or cissing. CONSTITUTION: This coating liquid for forming a metallic oxide film contains (1) a metallic complex of aβ-diketone and (2) a specific aprotic polar solvent selected from N,N-dimethylformamide, N,N-dimethylacetamide, acetonitrile, dimethyl sulfoxide, N,N,N',N'-tetraethylsulfamide, hexamethylphosphoric triamide, N-methylmorpholine, N-methylpyrrole, N-ethylpyrrole, N-methyl-Δ3- pyrroline, N-methylpiperidine, N-ethylpiperidine, N,N-dimethylpiperazine, N- methylimidazole, etc.
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