| 摘要 |
PURPOSE: To remove foreign matters well locally polished even when formed of fine protrusion shape, by providing a tape transfer mechanism of continuously transfer feeding a polishing tape also to have a foreign matter removing part formed by a turn back guide, and providing a press mover capable of forming a polishing tape of the foreign matter removing part into almost protrusive spherical shape made elastic press slidable. CONSTITUTION: A mounting base 11 is moved to place a foreign matter removing part 26 of a tape transfer feed mechanism 12 opposed to foreign matter, in this condition to continuously transfer feed a polishing tape T in right/left directions of the mounting base 11 by the tape transfer feed mechanism 12, and to lower down an up/down moving base 14 actuating an up/down moving motor 16, with the foreign matter removing part 26 into press contact with foreign matter M, so as to polish it removed. Here is elastically pressed the polishing tape T of the foreign matter removing part 26 by an elastic press slidable press mover 37 to be formed into almost protrusive spherical shape, so as to polish the foreign matter M removed by a top point part formed into almost protrusive spherical shape of the polishing tape T. Accordingly, even the foreign matter, formed of fine protrusion shape in about 3 to 20μm height with almost a 20 to 80μm diameter, can be well locally polished to be removed. |
