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发明名称
EVALUATION EQUIPMENT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08227922(A)
申请公布日期
1996.09.03
申请号
JP19950032230
申请日期
1995.02.21
申请人
NEC KYUSHU LTD
发明人
NAGAYA KAZUHISA
分类号
G01B11/24;H01L21/66;H01S3/00;(IPC1-7):H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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