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发明名称
RF PROBE FOR MEMBRANE AND MEASURING DEVICE HAVING THE PROBE
摘要
申请公布号
JPH08226935(A)
申请公布日期
1996.09.03
申请号
JP19950032010
申请日期
1995.02.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUBAYASHI HIROTO
分类号
G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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