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发明名称
MAGNETIC NEUTRAL LINE DISCHARGE PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH08225967(A)
申请公布日期
1996.09.03
申请号
JP19950030678
申请日期
1995.02.20
申请人
ULVAC JAPAN LTD
发明人
UCHIDA TAIJIROU
分类号
H05H1/46;C23C14/35;C23C16/50;C23F4/00;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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