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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH08227880(A)
申请公布日期
1996.09.03
申请号
JP19950032160
申请日期
1995.02.21
申请人
NEC KYUSHU LTD
发明人
KAMINISHIZONO TAKAHIRO
分类号
C23C16/50;H01L21/205;H01L21/285;H01L21/31;(IPC1-7):H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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