| 摘要 |
<p>PURPOSE: To provide an intake air flow sensor in which a quantity of heat conducted to a support member from a detection part used to measure an intake air flow is suppressed as much as possible, in which the thermal responsivity of the detection part is enhanced and by which the intake air flow can be measured precisely immediately after a power supply has been turned on. CONSTITUTION: A flow-rate detection element 9 is composed of a ring-shaped detection part in which an insulating film is formed at least on the upstream side and in which a resistance film is formed on the insulating film and of a bonding part which is formed integrally with the detection part, in which an insulating film is formed at least on the upstream side and in which an electrode film is formed on the insulating film so as to be continued to the resistance film. Then, the detection part is supported perpendicularly to the flow direction of an intake air flow by a rod-shaped support member 11 in which an insulating film is formed excluding the circumference of a part bonded to the bonding part and in which an electrode film is formed on the insulating film. The electrode film for the support member and the electrode film for the bonding part are connected by a conductor.</p> |
