SHADING FILM FOR LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: To eliminate the generation of a harmful matter in a production process and to obtain a light shading ability and low reflection ability equivalent to those of a chromium-based multilayered film by forming a shading film into a two-layer constitution, molybdenum oxynitride and molybdenum from a substrate side. CONSTITUTION: A shading film has a layer 2 consisting of molybdenum compd. having an extinction coefft. of an optical constant at 550nm at a transparent substrate 3 side of 0.15 or more than 0.15 and 0.90 or less than 0.90, and a layer 1 formed on the layer 2 and consisting of molybdenum and/or a molybdenum compd. having an extinction coefft. of an optical constant at 550nm of 1.0 or more than 1.0. The layer 2 consisting of the molybdenum compsn. having the extinction coefft. of the optical constant at 550nm at the transparent substrate 3 side of 0.15 or more than 0.15 and 0.90 or less than 0.90 is preferably a layer consisting of molybdenum oxide and/or molybdenum oxynitride. the layer 1 consisting of the molybdenum and/or the molybdenum compd. having the attenuation coefft. of the optical constant at 550nm of 1.0 or more than 1.0 is preferably a layer consisting of molybdenum and/or molybdenum nitride.