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发明名称
Einrichtung für die Verhinderung von Überschlägen in Vakuum-Zerstäubungsanlagen
摘要
申请公布号
DE59303309(D1)
申请公布日期
1996.08.29
申请号
DE19935003309
申请日期
1993.08.27
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
STUERMER, JOHANN, D-63579 FREIGERICHT, DE;LUEBBEHUSEN, MICHAEL, DR., D-63486 BRUCHKOEBEL, DE;THORN, GERNOT, DIPL.-ING., D-63454 HANAU, DE
分类号
H01J37/34;(IPC1-7):H01J37/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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