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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH03169011(A)
申请公布日期
1991.07.22
申请号
JP19890309565
申请日期
1989.11.28
申请人
SEIKO INSTR INC
发明人
INOUE MASAHIRO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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