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发明名称
Electron beam device
摘要
申请公布号
EP0563543(B1)
申请公布日期
1996.08.28
申请号
EP19930101880
申请日期
1993.02.06
申请人
THOMCAST AG
发明人
MATHEWS, HANS-GUENTER,DR.;SCHMINKE, WOLFRAM, DR.
分类号
H01J19/38;H01J19/82;H01J21/10;H01J23/027;H01J23/34;H01J25/00;H02M7/19;H05H5/00;(IPC1-7):H02M7/10
主分类号
H01J19/38
代理机构
代理人
主权项
地址
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