| 发明名称 |
Flat box for confining a flat article under a special atmosphere |
| 摘要 |
A box is provided for confining a semiconductor water in an ultra clean atmosphere between working or storage points. It is mainly constituted by a body closed by a door and equipped with a gas distributing block making it possible to diffuse a quasi-laminar flow around the article within the body.
|
| 申请公布号 |
US5549205(A) |
申请公布日期 |
1996.08.27 |
| 申请号 |
US19950385065 |
申请日期 |
1995.02.07 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
DOCHE, CLAUDE |
| 分类号 |
B65D85/00;B65D85/86;H01L21/673;(IPC1-7):B65D81/05;B65D81/20 |
主分类号 |
B65D85/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
