| 摘要 |
<p>A target assembly in which the sputtering material is not soldered or otherwise metallurgically bonded to a backing plate (20). Rather, the target (30), which is homogeneously manufactured of sputtering material, is mechanically coupled (e.g., with bolts (45)) to an adapter (32), which is itself permanently affixed to the chamber (10). As a result, the target can be easily uncoupled from the chamber and replaced, without also requiring removal and replacement of a backing plate.</p> |
