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发明名称
HIGH RESOLUTION SEM APPARATUS HAVING ELECTRODE
摘要
申请公布号
KR960007148(Y1)
申请公布日期
1996.08.22
申请号
KR19930007829U
申请日期
1993.05.11
申请人
HYUNDAI ELECTRONICS IND. CO., LTD.
发明人
HWANG, JOON;INN, JAE - SIK
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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