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发明名称
PATTERN STRUCTURE FOR MEASURING CGSO AND LATERAL CAPACITANCE
摘要
申请公布号
KR960007142(Y1)
申请公布日期
1996.08.22
申请号
KR19900006117U
申请日期
1990.05.10
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
JUNG, WON - YONG;LEE, YONG - HOON;KIM, HYUN - CHOL
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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