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经营范围
发明名称
Sputtering system
摘要
申请公布号
EP0451642(B1)
申请公布日期
1996.08.21
申请号
EP19910105035
申请日期
1991.03.28
申请人
APPLIED MATERIALS, INC.
发明人
TEPMAN, AVI;PARKER, NORMAN WILLIAM
分类号
C23C14/35;C23C14/50;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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