| 摘要 |
PROBLEM TO BE SOLVED: To isolate an operation pneumatic system from a fluid system by integrating a valve function in a small single unit, and by a gasket type distortion film. SOLUTION: This valve integral type diaphragm pump is composed of first and second stiff layers 10 and 30, and a distortion film 20 provided therebetween. Recessed surfaces 13 and 33 in the two stiff layers form the pump. The valve integral type diaphragm pump is provided with an operation room alternately connected to a pressure source P and a vacuum source V. A pump room is connected through a filling check valve 150 and a division check valve 151 to a fluid source 6 and a fluid container 5. For these check valves, Duckbill and spring loaded ball check valves are used.
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