| 摘要 |
PURPOSE: To provide an orienting ferroelectric thin film element usable for an optical path element and a light modulating element, and a method for manufacturing it by forming an epitaxial or orienting ferroelectric thin film having a smooth surface on a monocrystal base by use of gas phase growing method and the growing method by the application of an organic metal compound and the subsequent heating. CONSTITUTION: An orienting ferroelectric thin film element has an epitaxial or highly orienting first ferroelectric film laminated on a monocrystal base by gas phase growing method, and an epitaxial or orienting second ferroelectric film formed by applying an organic metal compound thereon and subsequently heating it. The second ferroelectric film is formed by repeating the application of the organic metal compound and the subsequent heating several times. |
