3-layer acceleration sensor, esp. rpm sensor

摘要

The sensor has conducting paths (4) electrically insulated against the third layer (3) by recesses (10). A silicon on insulation layer structure is designed as the first, second and third layers (1,2,3). A comb structure is designed as the deflectable mass, which is deflectable parallel to the surface of the third layer. The comb structure is constructed from a first longitudinal member of a frame. First plates are arranged vertical to the direction of the member. The first plates are arranged vertical to the alignment of the members. A second members (19) are aligned parallel to the first member. The second beams have plates, which are aligned vertical to the second members and in the direction to the first member.