| 摘要 |
PURPOSE: To improve the surface cleanliness of the transparent conductive films formed on color filter chips. CONSTITUTION: Color filter films 3 are first patterned and formed respectively in plural blocks 2 set on a sheet substrate 1 in order to produce the color filter chips. The transparent conductive films 5 are formed on these color filter films 3. Further, the transparent conductive films 5 are provided thereon with temporal protective films 6 so as to cover the conductive films by forming the films of a resist material prepd. by introducing a hydroxyl group into an acrylate polymer. The sheet substrate 1 is cut along the blocks together with the temporary protective films 6 and is separated to the individual color filter chips 7. The temporal protective films 6 left on the color filter chips 7 are thereafter dissolved away by using a weakly alkaline washing liquid without contg. metal ions. Further, the residues of the resist material are oxidized away by irradiation with UV rays. Finally, liquid having known surface tension is dropped onto the transparent conductive films 5 and the cleanliness of the transparent conductive film surfaces is inspected by measuring the contact angles thereof. |
