摘要 |
PURPOSE: To enable a variable inductance element to be miniaturized making monolithic as well as easily adjusting the inductance L by external manipulation. CONSTITUTION: A coil 3 and fixed electrodes 5, 5 are formed on a substrate 2 and then beam electrodes 7 opposite to these fixed electrodes 5, 5 and the coil 3 are formed. Next, a DC power supply E is connected to the space between the beam electrodes 7 and the fixed electroded 5, 5 to vary the distance between the beam electrodes 7 and the coil 3 by this voltage. Resultantly, the magnetic flux density is heightened by the magnetic field from the coil 3 to increase the inductance L. |